Introduction to Microsystem Design by Werner Karl Schomburg

Author:Werner Karl Schomburg
Language: eng
Format: epub, pdf
Publisher: Springer Berlin Heidelberg, Berlin, Heidelberg

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The coefficient of thermal extension α th is a material constant which needs to be measured or found in a suitable book.

If a pressure load p is acting on the heated body against the direction of thermal extension, the strain generated by the pressure according to Hooke’s law needs to be added:

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In the above equation, ES is Young’s modulus of the heated body. The deflections wx and wz of the rigid body in direction of its length LS and thickness hS, respectively, under the action of compressive forces Fx and Fz are derived from the above equation (bS is the width of the body):

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